Article

Characterization of differential MEMS microphones in the ultrasonic range in amplitude response and SNR. (de)

Authors

* Presenting author
Day / Time: 07.03.2023, 15:40-16:20
Room: Foyer Z, Posterinsel I
Typ: Poster
Session: Akustische Messtechnik und Sensorik (Posterinsel I)
Information: Die Poster werden durchgängig von Dienstag bis Donnerstag im Foyer auf Ebene Z ausgestellt (3.OG vor dem Plenarsaal Z), sortiert nach thematischen Zusammenhängen in der hier angegebenen Posterinsel (siehe Sitzungstitel). Das Posterforum zur angegebenen Zeit bietet die Möglichkeit, mit den Autor*innen in Diskussion zu kommen.
Abstract: Can ordinary Micro-Electro-Mechanical-Systems (MEMS) microphones be used for near-ultrasonic applications? Manufacturers often provide little information about the signal-to-noise ratio (SNR) in the ultrasound (US) range and if they do, the data were determined manufacturer-specifically and are generally not comparable. Here, four different microphones from three different manufacturers are compared with respect to their amplitude response and noise floor. The deconvolution of an exponential sweep and a traditional calculation of the SNR are used. The equipment and methods used are specified, which makes it easy to repeat or expand the investigation. The SNR of MEMS microphones in the near US range is mainly affected by resonance effects. These can be matched for applications with low level signals and background noise such that the highest possible SNR can be achieved. Two MEMS microphones from Knowles performed best for the frequency range from 20 to 70 kHz; above 70 kHz an Infineon model has the best performance.
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